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Laser Micro-Machining System |
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This is the complete system. It is an integrated setup, with a high-precision
two-axis motorized stage for accurate placement of the sample under the laser
beam, a TV viewing system co-aligned with the laser beam, a computer with a
motion control board, and a lamp pumped Nd:YAG laser that can operate at
either 1064 or 532 nm.
Left: Some of the elements in the laser cavity. From left to right:
Power meter,
safety shutter with front mirror, doubling crystal and spatial filter. Off
the picture to the right would be the laser head, another spatial filter, beam
polarizer and the back mirror. The green (532 nm) laser can be seen.
Right: Closeup of the laser head with the lid removed. Both the
pumping lamp and the laser rod can be seen.
Left:
Closeup of the motorized stage. The laser beam comes down through the tube
at the top, which has a focusing lens at the bottom.
Right:
TV viewing system. Bottom right is the laser collimator. Bottom left is the
fold mirror for the laser. This only reflects at the laser wavelengths. It is
transparent at other wavelengths; this allows the TV camera, top right, to see
the sample that is being cut.